Measuring and testing – With fluid pressure – Leakage
Patent
1996-12-13
1998-07-07
Williams, Hezron E.
Measuring and testing
With fluid pressure
Leakage
73 498, 738659, G01M 304, G01M 320, B05D 300
Patent
active
057772096
ABSTRACT:
The present invention discloses a leakage detection apparatus for testing the vacuum tightness of a semiconductor processing equipment which is equipped with a universal adapter head for testing various components of the equipment and a method for conducting such tests. Valuable down time can be saved on the semiconductor fabrication equipment by pre-screening all components on the basis of vacuum tightness testing done by a leak detection chamber supplied with such universal adapter head before they are assembled into the fabrication equipment after a maintenance or cleaning procedure is conducted on the components.
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Taiwan Semiconductor Manufacturing Company , Ltd.
Wiggins J. David
Williams Hezron E.
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