Leak inspection method and leak inspector

Details Leak inspection method and leak inspector Leak inspection method and leak inspector

2007-05-24

2010-10-19

Lau, Tung S (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Mechanical measurement system

Reexamination Certificate

active

07818133

ABSTRACT:
In a calibration mode, an equilibrium period after pressurized gas is sealed in a device under inspection and a reference tank is divided into two periods; pressure-difference changes ΔP1and ΔP2are measured when a first-half equilibrium period of duration T1elapses and when a second-half equilibrium period of duration T1elapses, respectively; and a pressure-difference change ΔP3generated in an inspection period of duration T2is measured. A pressure-difference change CT2generated for duration T2from when a period of time in which the influence of an adiabatic change seems to become sufficiently stable elapses is measured. A drift correction coefficient K is calculated from these measured values using K=(ΔP3−CT2)/(ΔP1−ΔP2), is stored in a storage section, and is used in an inspection mode.

REFERENCES:
patent: 11-118657 (1999-04-01), None
patent: 2001-050854 (2001-02-01), None
patent: 2005-017107 (2005-01-01), None
patent: 2005-106539 (2005-04-01), None

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