Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate
2011-01-18
2011-01-18
Nguyen, Ha Tran T (Department: 2829)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
On insulating substrate or layer
C438S030000, C257S059000, C257S072000
Reexamination Certificate
active
07871868
ABSTRACT:
Lift-off method and half-tone photolithography are used to fabricate LCD TFT array plate. Only two photo masks are used to respectively define a first and a second metal layers to accomplish the LCD TFT array plate.
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Pan Chih-Jui
Tung Chun-Hao
Wang Yeong-Feng
Yu Liang-Bin
AU Optronics Corp.
Nguyen Ha Tran T
Pathak Shantanu C
Rabin & Berdo P.C.
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