Lateral resonant tunneling

Details Lateral resonant tunneling Lateral resonant tunneling

1995-06-07

1997-01-14

Wilczewski, Mary

Fishing, trapping, and vermin destroying

437126, H01L 21265, H01L 2120

Patent

active

055939082

ABSTRACT:
A resonant tunneling transistor (400) with lateral carrier transport through tunneling barriers (404, 408) grown as a refilling of trenches etched partially into a transverse quantum well (410) and defining a quantum wire or quantum dot (406). The fabrication methods include use of angled deposition to create overhangs at the top of openings which define sublithographic separations for tunneling barrier locations.

REFERENCES:
patent: 4912531 (1990-03-01), Reed et al.
patent: 5198879 (1993-03-01), Ohshima
patent: 5283445 (1994-02-01), Saito
patent: 5408106 (1995-04-01), Seabaugh
patent: 5455190 (1995-10-01), Hsu

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