Lateral high-voltage semiconductor devices with surface...

Active solid-state devices (e.g. – transistors – solid-state diode – With means to increase breakdown voltage threshold – In integrated circuit

Reexamination Certificate

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C257S605000, C257S606000

Reexamination Certificate

active

06936907

ABSTRACT:
This invention provides a method or an auxiliary method to implement optimum variation lateral flux on a semiconductor surface. The method is to cover one or more thin films of high permittivity dielectric material on the semiconductor surface. The one or more films are capable of transmitting flux into or extracting flux from the semiconductor surface, or even to extract some flux from a part of the semiconductor surface and then transmit the flux to another part of the semiconductor surface. By using optimum variation lateral flux, not only can high-voltage lateral devices be made, but also an edge-termination technique for high-voltage vertical devices is provided. While the thin films can be used to prevent the occurrence of strong electric fields produced at the edges of some doped regions, these regions are used to compensate other doped regions with opposite doping and different location. Thin films can also be used to realize an optimum variation lateral flux of a lateral semiconductor device, which is located on a substrate and the flux flowing between the semiconductor and the substrate is negligibly small.

REFERENCES:
patent: 4712877 (1987-12-01), Okada et al.
patent: 5332962 (1994-07-01), Sameshima
patent: 5726469 (1998-03-01), Chen
patent: 6235577 (2001-05-01), Jeon
patent: 6310365 (2001-10-01), Chen
patent: 2003/0006437 (2003-01-01), Mizuta et al.
X.B. Chen et al., “Optimization of the Drift Region of Power MOSFET's with Lateral Structures and Deep Junctions”, IEEE Transactions on Electron Devices, vol. ED-34. No. 11, Nov., 1957.
X.B. Chen et al., “Theory of Optimum Design of Reverse-Biasedp-nJunctions Using Resistive Field Plates and Variation Lateral Doping”, Solid-State Electronics, vol. 35, No. 9, pp. 1365-1370, 1992.
X.B. Chen et al., “Lateral high-voltage devices using an optimized variational lateral doping”, Int. J. Electronics, vol. 80, No. 3, pp. 449-459, 1996.

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