Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate
2011-06-14
2011-06-14
Fulk, Steven J (Department: 2891)
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
C257SE21309, C438S053000, C200S181000
Reexamination Certificate
active
07960804
ABSTRACT:
A latching zip-mode actuated mono wafer MEMS switch especially suited to capacitance coupled signal switching of microwave radio frequency signals is disclosed. The single wafer fabrication process used for the switch employs sacrificial layers and liquid removal of these layers in order to also provide needed permanent physical protection for an ultra fragile switch moving arm member. Latched operation of the achieved MEMS switch without use of conventional holding electrodes or magnetic fields is also achieved. Fabrication of a single MEMS switch is disclosed however large or small arrays may be achieved.
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Cortez Rebecca
Ebel John L.
Leedy Kevin D.
Strawser Richard E.
Strawser, legal representative Donald E.
AFMCLO/JAZ
Fulk Steven J
Krieger Daniel
The United States of America as respresented by the Secretary of
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