Laser scribing method

Details Laser scribing method Laser scribing method

1988-05-03

1989-09-12

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156656, 156667, 156901, 21912169, 21912185, B44C 122, C03C 1500, C03C 2506

Patent

active

048656860

ABSTRACT:
A laser scribing system and method is described. In the system, a film formed on a substrate is irradiated with laser beam which is focused on a limited portion of the film in order to remove the portion and produce a groove. Laser beam used for eliminating the portion of film formed on a substrate is deprived of its border portion in advance of the focusing. Sperical aberration is suppressed due to this elimination.

REFERENCES:
patent: 4786358 (1988-11-01), Yamazaki et al.

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