Optics: measuring and testing – Shape or surface configuration
Reexamination Certificate
2011-06-28
2011-06-28
Nguyen, Sang (Department: 2886)
Optics: measuring and testing
Shape or surface configuration
C356S607000, C356S634000, C356S635000, C250S234000, C250S372000, C359S385000
Reexamination Certificate
active
07969582
ABSTRACT:
A laser scanning microscope apparatus comprising, a controlling unit for obtaining height information at each scanning point of a sample to be examined by obtaining a relative distance that maximizes an intensity output from a photo-detecting unit, which is obtained when the sample to be examined is scanned with a light from a laser light source, when a relative distance is changed by a Z scanning unit, includes an arithmetic processing unit for obtaining a plurality of height profiles of one line acquired by scanning the sample to be examined in a state of light with the light defecting unit while shifting the plurality of height profiles of one line in a scanning direction by a predetermined amount, and for obtaining one profile by linking the plurality of height profiles.
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Korean Office Action dated Jan. 6, 2011 in counterpart Korean Application No. 10-2008-0128142.
Geometrical Product Specifications (GPS) Surface Texture: B0601; Profile Method; 2001; pp. 574-587 and pp. 21-34.
Geometrical Product Specifications (GPS) Surface Texture: B0632; Profile Method; 2001; pp. 594-599.
Holtz Holtz Goodman & Chick PC
Nguyen Sang
Olympus Corporation
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