Laser probe points

Details Laser probe points Laser probe points

2007-11-06

2007-11-06

Whitehead, Jr., Carl (Department: 2813)

Semiconductor device manufacturing: process

With measuring or testing

Optical characteristic sensed

Reexamination Certificate

active

10403620

ABSTRACT:
A P-type diffusion diode is used as a probe point for an infrared laser probing system. The P-type diffusion diode probe point may be formed on a semiconductor substrate and connected to an integrated circuit thereon. The P-type diffusion diode probe point may result in higher signal-to-noise ratios in testing of integrated circuits at lower voltages.

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