Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2007-05-03
2010-06-22
Walke, Amanda C. (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S950000, C430S290000, C430S292000, C430S306000, C430S322000, C430S945000, C430S947000
Reexamination Certificate
active
07741006
ABSTRACT:
A method for fabricating a disc stamper is provided. First, a substrate is provided. Next, a layer of a coatable inorganic material is coated on the substrate, wherein the coatable inorganic material is an oxide, in which the chemical element constitution is more than one element selected from the group consisting of Te, Al, Zr, and Ti. Next, a laser beam is utilized to perform direct write on the layer of the coatable inorganic material to form a relief pattern. Thereafter, a metal layer is electroplated on the relief pattern. Next, the metal layer is separated from the relief pattern. The layer of the coatable inorganic material is utilized to form the relief pattern, so that it is more compatibility to equipment apparatus and lower cost in contrast with sputtered PTM process.
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Akira Kouchiyama et. al, “High-Resolution Blue-Laser Matering Using an Inorganic Photoresist”, Jpn. J. Appl. Phys. vol. 42(2003) pp. 769-771 Part 1. No. 2B, Feb. 2003, The Japan Society of Applied Physics.
M. S. M. Saifullah, et al., “Sub-10 nm Electron Beam Nanolithography Using Spin-Coatable TiO2 Resists”, Nano Letters 2003 vol. 3, No. 11 p. 1587-1591.
Chang Sheng-Li
Hsu Ming-Fang
Jeng Tzuan-Ren
Yang Chin-Tien
Industrial Technology Research Institute
Jianq Chyun IP Office
Walke Amanda C.
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