Data processing: measuring – calibrating – or testing – Measurement system – Remote supervisory monitoring
Reexamination Certificate
2000-02-16
2002-06-18
Bui, Bryan (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system
Remote supervisory monitoring
C702S179000, C372S020000, C372S057000
Reexamination Certificate
active
06408260
ABSTRACT:
The present invention relates to quality alarm systems and in particular to quality alarm systems for electric discharge lasers used for integrated circuit lithography.
BACKGROUND OF THE INVENTION
An important use of gas discharge ultraviolet lasers such as KrF excimer lasers is as light sources for integrated circuit fabrication. These lasers are typically used with lithography machines called stepper and scanner machines. Lithography lasers are typically operated in a “burst” mode in which a large number (e.g. 85) die sections of a wafer are illuminated one-at-a-time. A typical burst of laser pulses (such as about 400) at (for example) 10 mJ per pulse is delivered at a repetition rate of about 2000 pulses per second to illuminate a single die section in about 0.2 second. After a die section is illuminated the laser is idle for a very short period (such as about 0.3 second) while the lithography equipment positions the wafer and the lens equipment of the lithography machine to illuminate the next die section. This on-off process continues until all die sections on the wafer have been illuminated at which time the laser is idle for a few seconds (such as about 8 seconds) while a new wafer is loaded for processing. This cycle continues as a part of an integrated circuit fabrication line which operates 24 hours per day, 7 days per week. All equipment must be extremely reliable because any unscheduled downtime can cost many thousands of dollars in lost production. In addition, it is extremely important for high quality circuit fabrication that the quality of the laser beam from the laser light source be maintained within narrow quality limits.
What is needed is a laser having intelligent internal monitoring, and preselectable quality standards and a notification technique to alert laser users as to when the beam quality is adequate for production and when it is not.
SUMMARY OF THE INVENTION
The present invention provides an electric discharge laser with an associated programmable controller which (1) will permit an operator to specify beam quality parameters based on historical data (2) will monitor those parameters and (3) will provide a notification signal to the operator informing him when the beam quality is adequate for integrated circuit fabrication. The controller is programmed to indicate an out-of-control condition when one or more quality parameters exhibit certain specified non-random behavior such as two out of three quality measurements deviating by more than 4 standard deviations and/or three out of four quality measurements deviating by more three standard deviations. In a preferred embodiment the program is designed to detect poor quality by looking for these “runs” of bad quantity data and to produce false indication of system out of control, on the average, no more than once each two months.
REFERENCES:
patent: 5978406 (1999-11-01), Rokni et al.
patent: 5982800 (1999-11-01), Ishihara et al.
patent: 5991324 (1999-11-01), Knowles et al.
patent: 6014398 (2000-01-01), Hofmann et al.
patent: 6188710 (2001-02-01), Besaucele et al.
Watson Tom A.
Watts Michael P. C.
Bui Bryan
Cymer Inc.
Ross John R.
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