Optical: systems and elements – Single channel simultaneously to or from plural channels
Reexamination Certificate
2007-09-14
2009-11-24
Wells, Nikita (Department: 2881)
Optical: systems and elements
Single channel simultaneously to or from plural channels
C359S623000
Reexamination Certificate
active
07623292
ABSTRACT:
It is an object of the present invention to provide a laser irradiation apparatus, a laser irradiation method, and a method for manufacturing a semiconductor device using the laser irradiation method that can suppress the energy distribution of the laser beam. The present invention provides a laser irradiation apparatus including a laser oscillator oscillating a pulsed laser beam, a lens assembly having a plurality of optical systems, position control means for controlling the position of the lens assembly to select at least two from the plurality of optical systems in synchronization with oscillations of a plurality of pulses of the pulsed laser beam, wherein the selected plurality of optical systems forms a plurality of pulses with spatial energy distribution inverted or rotated each other.
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Office Action (Application No. 200410079131.X) Dated Jun. 15, 2007.
Moriwaka Tomoaki
Tanaka Koichiro
Yamamoto Yoshiaki
Robinson Eric J.
Robinson Intellectual Property Law Office P.C.
Semiconductor Energy Laboratory Co,. Ltd.
Smith Johnnie L
Wells Nikita
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