4. Semiconductor device manufacturing: process
  5. Bonding of plural semiconductor substrates

Tomoaki Moriwaka

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Beam homogenizer and laser irradiation apparatus

Optical: systems and elements – Single channel simultaneously to or from plural channels – By surface composed of lenticular elements
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Beam homogenizer and laser irradiation apparatus

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate

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Beam homogenizer, laser irradiation apparatus, and method...

Optical waveguides – With optical coupler – Particular coupling structure
Reexamination Certificate

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Beam homogenizer, laser irradiation apparatus, and method...

Optical: systems and elements – Single channel simultaneously to or from plural channels – By surface composed of lenticular elements
Reexamination Certificate

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Beam homogenizer, laser irradiation apparatus, and method...

Optical waveguides – Planar optical waveguide
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2162053

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