Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Amorphous semiconductor
Reexamination Certificate
2011-08-23
2011-08-23
Smith, Matthew (Department: 2823)
Semiconductor device manufacturing: process
Formation of semiconductive active region on any substrate
Amorphous semiconductor
C438S662000, C257SE21134, C257SE21347
Reexamination Certificate
active
08003499
ABSTRACT:
An object of the present invention is to provide a method and a device for constantly setting the energy distribution of a laser beam on an irradiating face, and uniformly irradiating the laser beam to the entire irradiating face. Further, another object of the present invention is to provide a manufacturing method of a semiconductor device including this laser irradiating method in a process. Therefore, the present invention is characterized in that the shapes of plural laser beams on the irradiating face are formed by an optical system in an elliptical shape or a rectangular shape, and the plural laser beams are irradiated while the irradiating face is moved in a first direction, and the plural laser beams are irradiated while the irradiating face is moved in a second direction and is moved in a direction reverse to the first direction. The plural laser beams may be irradiated while the irradiating face is moved in the first direction, and the plural laser beams may be irradiated while the irradiating face is moved in the direction reverse to the first direction, and the irradiating face may be also moved in the second direction.
REFERENCES:
patent: 3900737 (1975-08-01), Collier et al.
patent: 3992682 (1976-11-01), White et al.
patent: 4131487 (1978-12-01), Pearce et al.
patent: 4249960 (1981-02-01), Schnable et al.
patent: 4327972 (1982-05-01), Brunsting
patent: 4330363 (1982-05-01), Biegesen et al.
patent: 4370175 (1983-01-01), Levatter
patent: 4410237 (1983-10-01), Veldkamp
patent: 4415794 (1983-11-01), Delfino et al.
patent: 4432648 (1984-02-01), Musto et al.
patent: 4734550 (1988-03-01), Imamura et al.
patent: 4779943 (1988-10-01), Tatsuno et al.
patent: 4908493 (1990-03-01), Susemihl
patent: 5208187 (1993-05-01), Tsubouchi et al.
patent: 5302798 (1994-04-01), Inagawa et al.
patent: 5304357 (1994-04-01), Sato et al.
patent: 5372836 (1994-12-01), Imahashi et al.
patent: 5393482 (1995-02-01), Benda et al.
patent: 5405804 (1995-04-01), Yabe
patent: 5438441 (1995-08-01), Rockstroh et al.
patent: 5508489 (1996-04-01), Benda et al.
patent: 5521107 (1996-05-01), Yamazaki et al.
patent: 5604635 (1997-02-01), Lawandy
patent: 5643826 (1997-07-01), Ohtani et al.
patent: 5669979 (1997-09-01), Elliott et al.
patent: 5708252 (1998-01-01), Shinohara et al.
patent: 5754328 (1998-05-01), Cobb et al.
patent: 5814156 (1998-09-01), Elliott et al.
patent: 5828481 (1998-10-01), Cobb et al.
patent: 5854803 (1998-12-01), Yamazaki et al.
patent: 5888839 (1999-03-01), Ino et al.
patent: 5893730 (1999-04-01), Yamazaki et al.
patent: 5893990 (1999-04-01), Tanaka
patent: 5923962 (1999-07-01), Ohtani et al.
patent: 5932118 (1999-08-01), Yamamoto et al.
patent: 5953597 (1999-09-01), Kusumoto et al.
patent: 5986807 (1999-11-01), Fork
patent: 6011275 (2000-01-01), Ohtani et al.
patent: 6013928 (2000-01-01), Yamazaki et al.
patent: 6038075 (2000-03-01), Yamazaki et al.
patent: 6071765 (2000-06-01), Noguchi et al.
patent: 6104741 (2000-08-01), Igarashi et al.
patent: 6136632 (2000-10-01), Higashi
patent: 6137633 (2000-10-01), Tanaka
patent: 6156997 (2000-12-01), Yamazaki et al.
patent: 6159777 (2000-12-01), Takenouchi et al.
patent: 6160827 (2000-12-01), Tanaka
patent: 6172330 (2001-01-01), Yamamoto et al.
patent: 6204099 (2001-03-01), Kusumoto et al.
patent: 6210996 (2001-04-01), Yamazaki et al.
patent: 6229115 (2001-05-01), Voss et al.
patent: 6242291 (2001-06-01), Kusumoto et al.
patent: 6242292 (2001-06-01), Yamazaki et al.
patent: 6248606 (2001-06-01), Ino et al.
patent: 6249385 (2001-06-01), Yamazaki et al.
patent: 6261856 (2001-07-01), Shinohara et al.
patent: 6265745 (2001-07-01), Kusumoto et al.
patent: 6281470 (2001-08-01), Adachi
patent: 6285042 (2001-09-01), Ohtani et al.
patent: 6291320 (2001-09-01), Yamazaki et al.
patent: 6313434 (2001-11-01), Patterson et al.
patent: 6335509 (2002-01-01), Jung
patent: 6335541 (2002-01-01), Ohtani et al.
patent: 6353203 (2002-03-01), Hokodate et al.
patent: 6410373 (2002-06-01), Chang et al.
patent: 6440785 (2002-08-01), Yamazaki et al.
patent: 6441965 (2002-08-01), Yamazaki et al.
patent: 6472295 (2002-10-01), Morris et al.
patent: 6521473 (2003-02-01), Jung
patent: 6528397 (2003-03-01), Taketomi et al.
patent: 6534744 (2003-03-01), Yamazaki et al.
patent: 6535535 (2003-03-01), Yamazaki et al.
patent: 6556711 (2003-04-01), Koga et al.
patent: 6563843 (2003-05-01), Tanaka
patent: 6573161 (2003-06-01), Miyasaka et al.
patent: 6602744 (2003-08-01), Ino et al.
patent: 6635849 (2003-10-01), Okawa et al.
patent: 6638800 (2003-10-01), Ishihara et al.
patent: 6660609 (2003-12-01), Tanaka et al.
patent: 6675057 (2004-01-01), Liu
patent: 6693257 (2004-02-01), Tanaka
patent: 6730550 (2004-05-01), Yamazaki et al.
patent: 6750423 (2004-06-01), Tanaka et al.
patent: 6753212 (2004-06-01), Yamazaki et al.
patent: 6770546 (2004-08-01), Yamazaki
patent: 6791060 (2004-09-01), Dunsky et al.
patent: 6800237 (2004-10-01), Yamamoto et al.
patent: 6806099 (2004-10-01), Takeda et al.
patent: 6809012 (2004-10-01), Yamazaki et al.
patent: 6844523 (2005-01-01), Yamazaki et al.
patent: 6849482 (2005-02-01), Yamazaki et al.
patent: 6861614 (2005-03-01), Tanabe et al.
patent: 6944195 (2005-09-01), Yamazaki et al.
patent: 6961184 (2005-11-01), Yamazaki et al.
patent: 6961361 (2005-11-01), Tanaka
patent: 6974731 (2005-12-01), Yamazaki et al.
patent: 7015422 (2006-03-01), Timans
patent: 7095762 (2006-08-01), Yamazaki et al.
patent: 7135390 (2006-11-01), Tanaka
patent: 7138306 (2006-11-01), Tanaka et al.
patent: 7160764 (2007-01-01), Tanaka et al.
patent: 7179698 (2007-02-01), Yamazaki et al.
patent: 7279721 (2007-10-01), Jennings et al.
patent: 7362784 (2008-04-01), Yamazaki et al.
patent: 7375010 (2008-05-01), Tanaka
patent: 7473622 (2009-01-01), Yamazaki et al.
patent: 2001/0010702 (2001-08-01), Tanaka
patent: 2001/0036755 (2001-11-01), Tanaka
patent: 2002/0094008 (2002-07-01), Tanaka
patent: 2002/0137311 (2002-09-01), Timans
patent: 2002/0151121 (2002-10-01), Tanaka
patent: 2003/0024905 (2003-02-01), Tanaka
patent: 2003/0035129 (2003-02-01), Phillips et al.
patent: 2003/0035219 (2003-02-01), Tanaka
patent: 2003/0038122 (2003-02-01), Yamazaki et al.
patent: 2003/0038123 (2003-02-01), Dykes et al.
patent: 2003/0059990 (2003-03-01), Yamazaki
patent: 2003/0080100 (2003-05-01), Yamazaki et al.
patent: 2003/0089690 (2003-05-01), Yamazaki et al.
patent: 2003/0132205 (2003-07-01), Yamazaki et al.
patent: 2003/0143337 (2003-07-01), Tanaka
patent: 2004/0069751 (2004-04-01), Yamazaki et al.
patent: 2004/0084427 (2004-05-01), Talwar et al.
patent: 2005/0092937 (2005-05-01), Tanaka
patent: 2006/0166470 (2006-07-01), Tanaka
patent: 2006/0215721 (2006-09-01), Tanaka et al.
patent: 2006/0215722 (2006-09-01), Tanaka et al.
patent: 2007/0000428 (2007-01-01), Yamazaki et al.
patent: 2007/0004110 (2007-01-01), Tanaka
patent: 2007/0254392 (2007-11-01), Tanaka
patent: 2008/0254598 (2008-10-01), Yamazaki et al.
patent: 1135731 (1996-11-01), None
patent: 1149213 (1997-05-01), None
patent: 1269276 (2000-10-01), None
patent: 1284741 (2001-02-01), None
patent: 1043110 (2000-10-01), None
patent: 1 055 479 (2000-11-01), None
patent: 1076359 (2001-02-01), None
patent: 1 083 590 (2001-03-01), None
patent: 1 162 023 (2001-12-01), None
patent: 1661656 (2006-05-01), None
patent: 60-189216 (1985-09-01), None
patent: 62-104117 (1987-05-01), None
patent: 63-138991 (1988-09-01), None
patent: 01-173707 (1989-07-01), None
patent: 01-239837 (1989-09-01), None
patent: 02-051224 (1990-02-01), None
patent: 02-181419 (1990-07-01), None
patent: 02-308423 (1990-12-01), None
patent: 03-210990 (1991-09-01), None
patent: 03-289128 (1991-12-01), None
patent: 05-102062 (1993-04-01), None
patent: 05-226790 (1993-09-01), None
patent: 06-067119 (1994-03-01), None
patent: 06-140323 (1994-05-01), None
patent: 07-183540 (1995-07-01), None
patent: 08-195357 (1996-07-01), None
patent: 09-043541 (1997-02-01), None
patent: 09-102468 (1997-04-01), None
patent: 09-180997 (1997-07-01), None
patent: 09-260302 (1997-10-01), None
patent: 09-281085 (1997-10-01), None
patent: 10-197709 (1998-07-01), None
patent: 10-223554 (1998-08-01), None
patent: 10-3
Jefferson Quovaunda
Robinson Eric J.
Robinson Intellectual Property Law Office P.C.
Semiconductor Energy Laboratory Co,. Ltd.
Smith Matthew
LandOfFree
Laser irradiating device, laser irradiating method and... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Laser irradiating device, laser irradiating method and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Laser irradiating device, laser irradiating method and... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2659408