Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent
1988-07-28
1990-05-22
Schor, Kenneth M.
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With microwave gas energizing means
356355, 356357, 156626, G01B 1106, H01L 21306
Patent
active
049274856
ABSTRACT:
A laser end point detector incorporating adjustable-focus, variable-orientation detection optics for monitoring different types of structures such as laser-transparent thin films, isolated trenches or holes and patterned arrays of trenches or holes is disclosed. A collector lens package comprising a laser and a focusing lens are mounted in a hole in a collector lens which is pivotally mounted for selectively focusing zero, first and higher orders of diffractions reflected from the wafer onto an associated detector to monitor the etching of different types of structures. For example, zero order diffraction signals are used to monitor the etching of large target areas in transparent thin films or of non-patterned trenches or holes. First order (or higher) diffraction signals are used for monitoring the etching of patterned features which effect a two-dimensional diffraction grating, such as the capacitor holes in dynamic random access memories.
REFERENCES:
patent: 4618262 (1986-10-01), Maydan et al.
patent: 4660980 (1987-04-01), Takabayashi et al.
Cheng David
Hartlage Robert P.
Zhang Wesley W.
Applied Materials Inc.
Burns Todd J.
Dalton Philip A.
Schor Kenneth M.
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