Laser induced dry chemical etching of metals

Details Laser induced dry chemical etching of metals Laser induced dry chemical etching of metals

1984-01-24

1984-12-25

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156345, 156635, 156646, 156656, 156664, 156666, 219121LJ, 427 531, C23F 102, B44C 122, C03C 1500, C03C 2506

Patent

active

044902107

ABSTRACT:
Disclosed is a method of etching a metallized substrate by laser radiation. The substrate is exposed to a selected gas which spontaneously reacts with the metal forming a solid reaction product with the metal by a partial consumption of the metal. A beam of radiation of a wavelength suitable for absorption by the reaction product and/or by the metal thereunder is applied in a desired pattern to vaporize the reaction product and thereby selectively etch the metal.

REFERENCES:
patent: 3364087 (1968-01-01), Solomon et al.
patent: 4221047 (1980-09-01), Narken et al.
patent: 4245273 (1981-01-01), Feinberg et al.
patent: 4260649 (1981-04-01), Dension et al.
patent: 4331504 (1982-05-01), Chuang et al.
patent: 4332999 (1982-06-01), Wittke
"Laser-Enhanced Gas-Surface Chemistry: Basic Processes and Applications" by T. J. Chuang, J. Vac. Sci. Technol. 21(3), Sep./Oct., 1982, pp. 798-806.
"Laser-Induced Chemical Etching of Ferrites" by J. Addy et al., IBM Technical Disclosure Bulletin, vol. 25 No. 7A Dec., 1982, p. 3256.
"A Fabrication Technique for Multilayer Ceramic Modules" by H. D. Kaiser et al., Solid State Technology/May, 1972, pp. 35-40.
"Laser-Enhanced Chemical Etching of Solid Surfaces" by T. J. Chuang, IBM J. Res. Develop. vol. 26 No. 2, Mar., 1982, pp. 145-150.
"Surface Etching by Laser-Generated Free Radicals" by J. I. Steinfeld et al., J. of the Electrochemical Society, vol. 127, No. 1, Jan., 1980, pp. 514-515.

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