Coherent light generators – Particular active media – Gas
Patent
1998-03-12
2000-02-01
Scott, Jr., Leon
Coherent light generators
Particular active media
Gas
372 59, H01S 322
Patent
active
060211504
ABSTRACT:
Disclosed is a laser useful in, e.g., photolithography or medical surgery. In one embodiment, the laser comprises a discharge chamber and heat-generating electronics that are enclosed in a baffled enclosure that requires less cooling air to reliably cool the components in the enclosure than previous unbaffled enclosures. A method of reducing the amount of conditioned air is also provided. In a further embodiment, the laser has a heat-exchange system that acts quickly in response to changes in laser gas temperature by adjusting a flow-proportioning valve regulating water flow through a heat exchanger, thereby providing a continuously variable rate of heat exchange through the heat exchanger to maintain the lasing gas temperature constant. Methods of providing a laser beam and of improving the uniformity of a laser beam are disclosed, as are photolithography methods utilizing a laser and method of this invention.
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Das Palash P.
de Ruyter Anthony J.
Fomenkov Igor V.
Larson Donald G.
Partio William N.
Cymer Inc.
Holland Charles D.
Jr. Leon Scott
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