4. Coherent light generators
  5. Particular active media
  6. Gas

William N. Partio

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active

Collector for EUV light source

Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate

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High power deep ultraviolet laser with long life optics

Coherent light generators – Particular active media – Gas
Reexamination Certificate

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Laser having baffled enclosure

Coherent light generators – Particular active media – Gas
Patent

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Laser thin film poly-silicon annealing optical system

Electric heating – Metal heating – By arc
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1117360

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