Laser etching of semiconductors

Details Laser etching of semiconductors Laser etching of semiconductors

1994-04-22

1996-01-23

Breneman, R. Bruce

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

1566431, H01L 21306

Patent

active

054862647

ABSTRACT:
A laser-based technique for rapid etching of a semi-insulating substrate is described wherein a vertically suspended semiconductive sample is placed in an etchant solution. An intermittent laser beam is applied thereto whereby gas bubbles formed during the application of the laser beam to the laser reaction zone are displaced during the dark period of the intermittent laser beam.

REFERENCES:
patent: 4904340 (1990-02-01), Miracky et al.
patent: 5057184 (1991-10-01), Gupta et al.
Takai, M., et al., "Laser Induced Etching of III-V Compound Semiconductors", May 6, 1986, pp. 805-810.
Grebel, H., et al., "Photoelectrochemical etching of n-InP in a thin-film cell", Dec. 18, 1989, pp. 2655-2657; Appl. Phys. Lett 55 (25).
Kohl, P. A., et al., "p-InP photoetching", Oct. 1990, pp. 3315-3316; Electrochem. Soc. vol. 137, No. 10.
Svorcik, V., et al., "Photoelectrochemical etching of n-GaAs and n-InP", 1988; pp. K35-39; Physica Status Solidi (a) 106.
Svorcik, V., et al., "laser-stimulated etching of n-type semiconductors", Mar. 11, 1988, pp. 548-551; Chemical Physics Lett. vol. 144, #5,6.
Bjorkholm, J. E., et al., "Localized wet-chemical etching of inP induced by laser heating", pp. 574-576; Appl. Phys. Lett. 43 (6) Sep. 15, 1983.
Li, ding, et al., "Properties of laser-induced thermochemical etching of InP," 1988, pp. 29-32; Journal of Electronic Materials vol. 17, No. 1.
Willner, A. E., et al., "Photobias effect in laser-controlled etching of InP," pp. 1198-1200; Appl. Phys. Lett. 53 (13), Sep. 26, 1988.
D'Asaro, L. A., et al., "Improved Performance of GaAs Microwave Field-Effect Transistors with Low Inductance Via-Connections Through the Substrate," Oct. 1978; pp. 1218-1221; IEEE Trans. on Electron Devices; vol. ED-25, No. 10.
Andrade, T., "Manufacturing Technology for GaAs Monolithic Microwave Integrated Circuits;" Solid State Technology, pp. 199-205, Feb. 1985.
Ferry, David K., "Gallium Arsenide Technology,"214-217.
Arnaud, J. A., "Technique for Fast Measurement of Gaussian Laser Beam Parameters," Dec. 1971, pp. 2775-2776; Applied Optics, vol. 10, No. 12.

Affiliated with

Also associated with

Rating

Laser etching of semiconductors does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Laser etching of semiconductors, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Laser etching of semiconductors will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1502815