Laser etch-back process for forming a metal feature on a non-met

Details Laser etch-back process for forming a metal feature on a non-met Laser etch-back process for forming a metal feature on a non-met

1991-11-29

1993-06-22

Hearn, Brian E.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

437173, 156634, 21912168, H01L 21306

Patent

active

052214265

ABSTRACT:
An improved laser etch-back process forms a metal feature on an area of a polymeric or other non-metallic substrate. The process comprises forming a metal layer on the area that includes a first, relatively thick section, and a second, relatively thin section. Thereafter, the metal layer is uniformly irradiated with a laser pulse, but not to vaporize metal from the thick section. Thus, the laser pulse selectively etches the thin section to remove the metal and expose the substrate, without disturbing the thick section, which forms the desired metal feature.

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patent: 4644130 (1987-02-01), Bachmann
patent: 4684437 (1987-08-01), Donelon et al.
patent: 4880959 (1989-11-01), Baum et al.
patent: 5032233 (1991-06-01), Yu et al.
patent: 5066611 (1991-11-01), Yu
patent: 5093279 (1992-03-01), Andreshak et al.
Metal Finishing Guidebook Directory 1987, Metals and Plastic Publication, Inc. (1987) pp. 212-213.

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