Laser directed chemical vapor deposition of transparent metal fi

Details Laser directed chemical vapor deposition of transparent metal fi Laser directed chemical vapor deposition of transparent metal fi

1988-05-04

1990-11-20

Herbert, Thomas J.

Stock material or miscellaneous articles

Structurally defined web or sheet

Including variation in thickness

427 531, 427109, 427250, 428336, 428457, B32B 300, B32B 1504, B05D 306

Patent

active

049718533

ABSTRACT:
A thin platinum film which is both conductive and transparent is produced by laser chemical vapor deposition of a suitable organometallic compound, such as allyl cyclopentadienyl platinum. After deposition, the film is annealed to increase the relative abundance of platinum with respect to carbon. The film can be further conditioned by electrically cycling the same in a bath of sulfuric acid.

REFERENCES:
patent: 4022928 (1977-05-01), Piucyzk
patent: 4701592 (1987-10-01), Cheung
Tierney et al., Transparent Metal Microstructures, J. Phys. Chem. 1989, vol. 3, pp. 2880-2882, Apr. 20, 1989.

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