Laser deposition of crystalline boron nitride films

Details Laser deposition of crystalline boron nitride films Laser deposition of crystalline boron nitride films

1991-03-04

1992-01-14

Lewis, Michael L.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156610, 156612, 156DIG80, 156DIG86, 156DIG99, 20415741, 423290, 427255, 427 42, 427 531, C30B 2306, C23C 1634, C01B 21064

Patent

active

050807536

ABSTRACT:
Thin films of boron nitride are grown on single crystal silicon substrates using laser deposition techniques. The films are characterized by essentially a single crystal throughout and having a cubic structure which is in epitaxial registry with the underlying silicon substrate.

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