Laser ablation apparatus

Details Laser ablation apparatus Laser ablation apparatus

1992-07-31

1993-07-13

Albritton, C. L.

Electric heating

Metal heating

By arc

21912176, 21912184, 21912186, B23K 2600

Patent

active

052276082

ABSTRACT:
A laser ablation apparatus includes a laser beam source for ablation for emitting a first laser beam, a lens for focusing the first laser beam, a vacuum chamber having a window on its wall through which the first laser beam is injected into the vacuum chamber, a target holder arranged in the vacuum chamber to hold a target onto which the first laser beam is irradiated, a substrate holder arranged opposing to the target holder in the vacuum chamber to hold a substrate, and a laser beam source for particle decomposition for emitting a second laser beam in the vacuum chamber to decompose particles turned out from the target by the first laser beam in the vacuum chamber. The apparatus can further include a pair of mirrors, arranged on both sides of the target holder, for multiply reflecting the second laser beam over the target holder.

REFERENCES:
patent: 5017277 (1991-05-01), Yoshida et al.

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