Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1995-05-23
1997-09-30
Noland, Thomas P.
Measuring and testing
Surface and cutting edge testing
Roughness
250306, 359391, G02B 2106, G01B 904, G01N 2184, G01N 2101
Patent
active
056728166
ABSTRACT:
A large scale horizontal translation stage for a microscope or other instrument particularly a scanning probe microscope is disclosed. The translation stage is provided with air bearings which allow it to float over a planar surface. The translation stage is kinematically mounted on a guiding member such that the horizontal position of the translation stage is defined by the guiding member but the translation stage is free to move in a direction perpendicular to the planar surface. To position a sample, the air bearings are actuated and the guiding member moves the translation stage to a desired position. An attractive force, preferably suction in the air bearings, is then applied to hold the translation stage firmly against the supporting surface while the sample is analyzed. The preferred embodiment includes two optical microscopes. The first optical microscope is directed substantially perpendicular to the plane of the sample and has a focal point which coincides with the surface of the sample when it is being positioned by the translation stage. The second optical microscope is directed obliquely and focused on the probe.
REFERENCES:
patent: 1864895 (1932-06-01), Egy
patent: 2691887 (1954-10-01), Rinker
patent: 3721119 (1973-03-01), Strimel
patent: 3835699 (1974-09-01), Strimel
patent: 3909105 (1975-09-01), Neiswander et al.
patent: 4103542 (1978-08-01), Wheeler et al.
patent: 4391044 (1983-07-01), Wheeler
patent: 4417770 (1983-11-01), Tucker
patent: 4556317 (1985-12-01), Sandland et al.
patent: 4723086 (1988-02-01), Leibovich et al.
patent: 4742299 (1988-05-01), Stone
patent: 4778143 (1988-10-01), Koshiba
patent: 4899055 (1990-02-01), Adams
patent: 4935634 (1990-06-01), Hansma et al.
patent: 4993696 (1991-02-01), Furukawa et al.
patent: 4999494 (1991-03-01), Elings
patent: 5103095 (1992-04-01), Elings et al.
patent: 5132837 (1992-07-01), Kitajima
patent: 5157251 (1992-10-01), Albrecht et al.
patent: 5172002 (1992-12-01), Marshall
patent: 5193383 (1993-03-01), Burnham et al.
patent: 5291775 (1994-03-01), Gamble et al.
patent: 5319960 (1994-06-01), Gamble et al.
patent: 5345815 (1994-09-01), Albrecht et al.
patent: 5376790 (1994-12-01), Linker et al.
patent: 5448399 (1995-09-01), Park et al.
patent: 5463897 (1995-11-01), Prater et al.
Advertisement for PAS 5500, Electronic Business, Mar. 30, 1992, p. 101.
Kirk Michael D.
Park Sang-il
Smith Ian R.
Noland Thomas P.
Park Scientific Instruments
LandOfFree
Large stage system for scanning probe microscopes and other inst does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Large stage system for scanning probe microscopes and other inst, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Large stage system for scanning probe microscopes and other inst will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2258491