Large diameter wafer conveying system and method thereof

Details Large diameter wafer conveying system and method thereof Large diameter wafer conveying system and method thereof

1996-12-18

2000-05-30

Cherry, Johnny D.

Handling: hand and hoist-line implements

Utilizing fluid pressure

Venturi effect

294 871, B66C 102

Patent

active

060683163

ABSTRACT:
A large diameter wafer conveying system includes a vacuum supplier and a valve unit for ON/OFF controlling a vacuum supplied from the vacuum supplier. A wafer holder stably absorbs and holds a wafer by using the vacuum supplied from the vacuum supplier through the valve unit. A residual vacuum clearer automatically clears a portion of the vacuum which remains after the valve unit is turned OFF to completely remove the vacuum.

REFERENCES:
patent: 2999715 (1961-09-01), Firestone
patent: 3865420 (1975-02-01), Warren
patent: 4858975 (1989-08-01), Ogawa
patent: 5217273 (1993-06-01), Hendricsen et al.

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