Large collection angle x-ray monochromators for electron...

Details Large collection angle x-ray monochromators for electron... Large collection angle x-ray monochromators for electron...

2005-12-05

2008-09-23

Berman, Jack I. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000, C250S311000, C250S370090, C378S043000, C378S063000, C378S051000, C378S062000, C378S064000, C378S120000, C378S090000, C378S092000

Reexamination Certificate

active

07427757

ABSTRACT:
X-ray monochromators and electron probe micro-analysis (EPMA) systems using such monochromators are disclosed. A turretless x-ray monochromator may have a cassette of reflectors instead of a turret. The cassette stores a plurality of reflectors that can be inserted into a conventional Rowland circle monochromator geometry. A transfer mechanism selectively moves reflectors from the cassette to a reflector positioner. The use of the cassette allows each reflector to be placed closer to a source of x-rays, thereby allowing a larger solid angle for x-ray collection. An alternative x-ray monochromator uses a non-focusing reflector that can be fixed, scanned axially or scanned radially to provide large solid angle detection of x-rays at various energies with a single reflector.

REFERENCES:
patent: 6710341 (2004-03-01), Terauchi
F. Adams, K. Jannsens and A. Snigirev, “Microscopic X-ray fluorescence analysis and related methods with laboratory and synchrotron radiation sources”, Journal of Analytical Atomic Spectrometry, May 1998, vol. 13, pp. 319-331.

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