Large area microstructure processing

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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29580, 156643, 156662, 357 17, H01L 21306

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active

041690095

ABSTRACT:
A plurality of different monolithic, three-dimensional thin-film infared waveguide structures having high optical power handling capability, low optical propagating loss, long propagation and interaction length and distortion-free characteristics are fabricated through high precision mechanical, chemo-mechanical, and ion-beam thinning of a bulk crystal wafer.

REFERENCES:
patent: 3342652 (1967-09-01), Reisman et al.
patent: 3548189 (1970-12-01), Meinel et al.
patent: 3586547 (1971-06-01), Glendinning
patent: 3629023 (1971-12-01), Strehlow
patent: 3976511 (1976-08-01), Johnson
Government Report Entitled: Infrared Waveguide Modulators at Microwave Frequencies, Semi-Annual Technical Report for the Period: Mar. 25, 1975 to Sep. 25, 1975, Section 2.0 and 3.0; High Power IR Waveguide Modulators and Microwave Characteristics of IR Waveguide Modulators, respectively.

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