Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate
2005-03-08
2005-03-08
Dang, Trung (Department: 2823)
Semiconductor device manufacturing: process
Coating of substrate containing semiconductor region or of...
Insulative material deposited upon semiconductive substrate
C438S782000, C438S939000, C257S643000, C257SE21024
Reexamination Certificate
active
06864192
ABSTRACT:
A Langmuir-Blodgett film may be utilized as a chemically amplified photoresist layer. Langmuir-Blodgett films have highly vertically oriented structures which may be effective in reducing line edge or line width roughness in chemically amplified photoresists.
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Choi Hok-Kin
Deng Hai
Liou Huey-Chiang
Yueh Wang
Dang Trung
Intel Corporation
Trop Pruner & Hu P.C.
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