Lamp for rapid thermal processing chamber

Details Lamp for rapid thermal processing chamber Lamp for rapid thermal processing chamber

2007-02-15

2009-11-03

Patel, Nimeshkumar D. (Department: 2879)

Electric lamp and discharge devices

With envelope

Having base and connector

C438S014000

Reexamination Certificate

active

07612491

ABSTRACT:
A lamp assembly adapted for use in a substrate thermal processing chamber to heat the substrate to temperatures up to at least about 1100° C. is disclosed. In one embodiment, the lamp assembly comprises a bulb enclosing at least one radiation generating filament attached to a pair of leads, a lamp base configured to receive the pair of leads, a sleeve having a wall thickness of at least about 0.013 inches and a potting compound having a thermal conductivity greater than about 100 W/(K-m).

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