Electric lamp and discharge devices: systems – Automatic substitution of the load device or electrode – Plural load devices with selective substitution of load...
Reexamination Certificate
2011-04-12
2011-04-12
Owens, Douglas W (Department: 2821)
Electric lamp and discharge devices: systems
Automatic substitution of the load device or electrode
Plural load devices with selective substitution of load...
C315S091000, C315S291000
Reexamination Certificate
active
07923933
ABSTRACT:
An apparatus and method for detecting lamp failure is described for an array of lamps used in a rapid thermal processing system. The lamp failure detection system enables identification of a failed lamp among a plurality of lamps, and also provides identification of the failure type. The apparatus applies a lamp failure detection method to the voltage drop values measured across each lamp to determine if a lamp is in a failure state. In one embodiment, a field programmable gate array is used to apply a failure detection method to the lamp voltage values.
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International Search Report (EPO), May 8, 2008.
Goldin Alexander
Ranish Joseph Michael
Serebryanov Oleg V.
A Minh D
Applied Materials Inc.
Owens Douglas W
Patterson & Sheridan LLP
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