Illumination – Quick disconnect-type light unit – Particular engagement
Reexamination Certificate
2006-12-12
2006-12-12
Cariaso, Alan (Department: 2875)
Illumination
Quick disconnect-type light unit
Particular engagement
C362S278000, C362S640000, C362S657000, C439S247000
Reexamination Certificate
active
07147359
ABSTRACT:
A lamp assembly for a substrate processing chamber is described. The lamp assembly comprises a tubular body having first and second ends, a lamp element at least partially seated in the first end having a filament and first electrical connectors, transmission wires attached to the first electrical connectors, and a rigid plug flexibly positioned relative to the second end of the tubular body having second electrical connectors attached to the transmission wires. The flexibly positioned rigid plug is generally capable of a range movement in directions both perpendicular and parallel to a longitudinal axis of the tubular body. In one version, the rigid plug comprises first and second plug elements.
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Desai Abhijit
Havelind Apollo
Ranish Joseph M.
Applied Materials Inc.
Cariaso Alan
Janah & Associates
Lovell Leah S
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