Laminar flow vacuum chuck

Details Laminar flow vacuum chuck Laminar flow vacuum chuck

1993-08-26

1994-08-30

Bishop, Steven C.

Chucks or sockets

Vacuum

269 21, B25B 1100

Patent

active

053420683

ABSTRACT:
A laminar flow vacuum chuck (10) has a plurality of vacuum ports (20, 52) disposed near the center of the chuck. A plurality of interconnected grooves (22, 24, 26, 26, 30, 32, 34, 36, 38, 40, 42, 44, 46, 50, 62, 64) extend from the vacuum ports (20, 52) to the perimeter 14. By reason of the shape of the interconnected grooves and the location of the vacuum ports, the downward force on a wafer supported by the chuck increases as the wafer size increases.

REFERENCES:
patent: 2443987 (1948-06-01), Morrison et al.

Affiliated with

Also associated with

Rating

Laminar flow vacuum chuck does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Laminar flow vacuum chuck, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Laminar flow vacuum chuck will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-25564