Lactate-containing corrosion inhibitor

Details Lactate-containing corrosion inhibitor Lactate-containing corrosion inhibitor

2007-12-25

2007-12-25

Lindsay, Jr., Walter (Department: 2812)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S689000, C438S149000, C438S155000, C438S725000, C257SE21290, C257SE27131, C257SE27132

Reexamination Certificate

active

10879462

ABSTRACT:
The corrosion of aluminum-based metal films may be minimized by applying a lactate-containing solution to the aluminum-based metal films before the aluminum-based metal films are etched. The lactate-containing solution is applied to the aluminum-based metal film before the film is etched with a corrosive etchant. Minimizing the corrosion of the aluminum-based film may increase the yield and performance of the highly reflective pixel arrays that are formed from the aluminum-based metal for use in liquid crystal on silicon (LCOS) microprocessors for digital televisions.

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