Label for semiconductor wafer

Details Label for semiconductor wafer Label for semiconductor wafer

1996-11-22

1998-09-01

Loney, Donald

Stock material or miscellaneous articles

Structurally defined web or sheet

Edge feature

428131, 428212, 428156, B32B 2302

Patent

active

058009060

ABSTRACT:
A semiconductor wafer label for identifying a wafer includes at least one concave mark formed on an edge of a flat zone of each wafer. The label may include one or more concave marks having a first width and first length and one or more concave marks having a second width and a second length. Accordingly, it is not necessary to take the wafer out of a wafer cassette in order to read the wafer number, thereby reducing contamination and damage to the wafer.

REFERENCES:
patent: 3896247 (1975-07-01), Desoleve et al.

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