Special receptacle or package – For plate or sheet – Fragile or sensitive
Reexamination Certificate
2006-01-25
2008-09-09
Ackun, Jr., Jacob K (Department: 3728)
Special receptacle or package
For plate or sheet
Fragile or sensitive
C206S710000, C118S500000, C414S940000
Reexamination Certificate
active
07422107
ABSTRACT:
A substrate kinematic coupling or guide plate for a substrate carrier having textured or patterned surfaces at the points of contact to reduce frictional forces generated between automated processing equipment and the kinematic coupling. The textured surface reduces the contact area between the processing equipment and the contact portion of the kinematic coupling, thereby reducing the resultant frictional force. By reducing the frictional force, the substrate carrier more readily settles on the mounting pins of the processing equipment, thus avoiding intolerable height and angular deviations during automated access to the substrates. Textures include, but are not limited to, a knurl pattern, ridges running laterally along the contact portions, and ridges running longitudinally along the contact portions. The textures may be formed by a blow molding, injection molding or in an overmolding process, or by a machining or imprinting process.
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Semi,Semi E57-0299, Provisional Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers, Semi 1996, pp. 1-8.
Burns John
Forbes Martin L.
Fuller Matthew A.
King Jeffery J.
Smith Mark V.
Ackun Jr. Jacob K
Entegris, Inc.
Patterson Thuente Skaar & Christensen P.A.
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