Keyway alignment substrates

Details Keyway alignment substrates Keyway alignment substrates

1989-11-22

1990-12-04

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156644, 156647, 156657, 1566591, 156299, 1563041, 156556, 269 21, B44C 122, H01L 21306, B32B 3100, B31F 500

Patent

active

049751433

ABSTRACT:
The vacuum hold down alignment substrate is formed as an array of precisely aligned alignment substrate subunits. Each subunit is formed with an alignment pattern formed in a photo-patternable or electroformable material. When the plurality of alignment substrate subunits are formed into an array to produce the alignment substrate, the alignment patterns are aligned to receive corresponding patterns in discrete subunit devices which are aligned into an array on the alignment substrate.

REFERENCES:
patent: 3992236 (1976-11-01), Wanesky
patent: 4690391 (1987-09-01), Stoffel et al.

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