Josephson junction apparatus formed on flexible polymeric film a

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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156631, 156634, 156656, 1566591, 156667, 20419224, 505728, 505817, 505820, B44C 122, C23F 102

Patent

active

051319764

ABSTRACT:
A Josephson junction apparatus comprises a polymeric film having flexiblity, and a Josephson junction circuit formed on the polymeric film. The Josephson junction circuit includes a Josephson junction device and a wiring for connecting to the Josephson junction device. Namely, the Josephson junction apparatus has flexibility, and thus the Josephson junction apparatus can be placed not only on a flat surface but also it can be placed on a curved surface in practice. Furthermore, in the Josephson junction apparatus, when a functional polymeric film is used as a substrate of a Josephson junction of the Josephson junction device, a protective film is previously formed over the functional polymeric film, so that a wetting of the functional polymer film, which is caused by water or organic solvents being used used repeatedly during the manufacturing process, can be prevented and a dimensional stability of the film can be increased. Therefore, a minute Josephson junction can be formed onto the polymeric film without causing a dimentional discrepancy in pattern, and a reliability thereof can be increased.

REFERENCES:
patent: 3409466 (1968-11-01), Slay et al.
patent: 4412902 (1983-11-01), Michikami et al.
patent: 4956335 (1990-09-01), Agostinelli et al.
patent: 4964945 (1990-10-01), Calhoun
patent: 4988674 (1991-01-01), Mir et al.
H. Shibayama et al., "Formation of Low Defect Density SiO.sub.x Film for Josephson Integrated Circuits", Appl. Phys. Lett. 47(4), pp. 429-430, Aug. 15, 1985.

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