Job queue management system and method thereof, including...

Details Job queue management system and method thereof, including... Job queue management system and method thereof, including...

2007-11-27

2007-11-27

Jarrett, Ryan A (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S101000, C700S121000

Reexamination Certificate

active

10818916

ABSTRACT:
A system and method for job queue management. A job queue management apparatus acquires multiple wafer lot records individually regarding a plurality of wafers processed by a recipe, clusters the wafer lots by the common recipe into a group, creates a process job corresponding to the group, and stores the process job in a job queue of a fabrication tool.

REFERENCES:
patent: 7043319 (2006-05-01), Logsdon et al.
patent: 2004/0049398 (2004-03-01), Gartland et al.

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