Isotopically pure silicon-on-insulator wafers and method of...

Details Isotopically pure silicon-on-insulator wafers and method of... Isotopically pure silicon-on-insulator wafers and method of...

2006-10-10

2006-10-10

Wilson, Allan R. (Department: 2815)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S076000, C257SE27112

Reexamination Certificate

active

07119400

ABSTRACT:
A semiconductor wafer structure having a device layer, an insulating layer, and a substrate which is capable of supporting increased semiconductor device densities or increased semiconductor device power. One or more of the layers includes an isotopically enriched semiconductor material having a higher thermal conductivity than semiconductor material having naturally occurring isotopic ratios. The wafer structure may be formed by various techniques, such as wafer bonding, and deposition techniques.

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Wolf et al., Silicon Processing for the VLSI Era, vol. 1: Process Technology, Lattice Press, Sunset Beach, California, pp. 151-155.

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