Isotopically pure silicon-on-insulator wafers and method of...

Details Isotopically pure silicon-on-insulator wafers and method of... Isotopically pure silicon-on-insulator wafers and method of...

2005-03-15

2005-03-15

Quach, T. N. (Department: 2814)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S352000, C257S616000

Reexamination Certificate

active

06867459

ABSTRACT:
The present invention provides improved semiconductor wafer structures having isotopically-enriched layers and methods of making the same.

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Wolf, S., et al., Silicon Processing for the VLSI Era, vol. 1—Process Technology, Lattice Press, 1986, pp. 151-155.

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