Isolation structure for protecting dielectric layers from...

Details Isolation structure for protecting dielectric layers from... Isolation structure for protecting dielectric layers from...

2008-12-02

2011-11-08

Fahmy, Wael (Department: 2823)

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

Of specified configuration

C257S508000, C257SE23011, C257SE23141

Reexamination Certificate

active

08053902

ABSTRACT:
An integrated circuit structure includes a semiconductor substrate; and an interconnect structure overlying the semiconductor substrate. A solid metal ring is formed in the interconnect structure, with substantially no active circuit being inside the solid metal ring. The integrated circuit structure further includes a through-silicon via (TSV) having a portion encircled by the solid metal ring. The TSV extends through the interconnect structure into the semiconductor substrate.

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