Isolated tungsten microelectromechanical structures

Details Isolated tungsten microelectromechanical structures Isolated tungsten microelectromechanical structures

1993-06-04

1995-03-21

Ryan, Patrick J.

Stock material or miscellaneous articles

Structurally defined web or sheet

Discontinuous or differential coating, impregnation or bond

428210, 310 40MM, 310309, B32B 900

Patent

active

053994159

ABSTRACT:
A process for fabricating mechanically interconnected, released, electrically isolated metal microstructures, and circuit components and actuators produced by the process. A dielectric stack on a substrate is patterned and etched to produce trenches in which a metal such as tungsten is deposited. The dielectric is removed from selected regions of the metal to expose metal beams, and to form mechanically interconnecting, electrically insulating hinges supporting the beams. The beams and hinges are then released for relative motion. Electrical potentials may be established between adjacent beams to produce controlled motion.

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