Static information storage and retrieval – Systems using particular element – Ferroelectric
Patent
1996-03-20
1998-11-17
Nelms, David C.
Static information storage and retrieval
Systems using particular element
Ferroelectric
257295, 257763, H01L 2978, G11C 1122
Patent
active
058386050
ABSTRACT:
An iridium oxide local interconnect method for a ferroelectric memory cell includes the steps of forming a conductive layer that extends from a source/drain contact of the transistor proximate to an electrode contact of the ferroelectric capacitor and forming an iridium oxide local interconnect extending from the source/drain contact of the transistor to the electrode contact of the ferroelectric capacitor. The conductive layer is laterally terminated not less than one-half micron from the electrode contact of the ferroelectric capacitor. The conductive layer can include an upper iridium layer and a bottom titanium nitride layer, or can include a single layer of completely reacted titanium nitride. After the local interconnect is formed a top oxide layer is deposited. A late recovery anneal is then performed in oxygen at an elevated temperature to rejuvenate the electrical characteristics of the ferroelectric capacitor. Finally, a bit line contact is opened and metalized.
REFERENCES:
patent: 4982309 (1991-01-01), Shepherd
patent: 5003428 (1991-03-01), Shepherd
patent: 5053917 (1991-10-01), Miyasaka et al.
patent: 5122923 (1992-06-01), Matsubara et al.
patent: 5191510 (1993-03-01), Huffman
patent: 5216572 (1993-06-01), Larson
patent: 5236550 (1993-08-01), Abt et al.
patent: 5369296 (1994-11-01), Kato
patent: 5471364 (1995-11-01), Summerfelt
patent: 5475248 (1995-12-01), Takenaka
patent: 5491102 (1996-02-01), Desu et al.
patent: 5554866 (1996-09-01), Nishioka
Kubida William J.
Mai Son
Meza Peter J.
Nelms David C.
Ramtron International Corporation
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