Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent
1984-08-13
1985-04-30
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
2504922, G01N 2100, G01N 2300
Patent
active
045146365
ABSTRACT:
A method and apparatus are disclosed for providing heat conduction between an article being treated in a vacuum and a support member by providing a gas under pressure of about 0.5 to 2.0 Torr between the article and the support member. The method and apparatus are described for use in a semiconductor wafer ion implantation system wherein the wafer is clamped to the support member which is cooled. A seal can be provided between the wafer and the support member adjacent the periphery of the article.
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Anderson Bruce C.
Eaton Corporation
Grace C. H.
Sajovec F. M.
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