Ion source with removable anode assembly

Details Ion source with removable anode assembly Ion source with removable anode assembly

2007-01-12

2008-10-21

Wells, Nikita (Department: 2881)

Radiant energy

Ion generation

Field ionization type

C250S424000, C250S426000, C315S111410, C315S111810, C313S362100

Reexamination Certificate

active

07439521

ABSTRACT:
An ion source has a removable anode assembly that is separable and from a base assembly to allow for ease of servicing the consumable components of the anode assembly. Such consumables may include a gas distributor, a thermal control plate, an anode, and one or more thermal transfer sheets interposed between other components. A pole piece and a cathode may also be part of the anode assembly. The anode assembly may be attached to the base assembly via the pole piece.

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