Ion source having improved cathode

Details Ion source having improved cathode Ion source having improved cathode

1979-12-03

1981-09-08

Krawczewicz, Stanley T.

Electric lamp and discharge devices

Discharge device with positive ion emitter

250427, 313359, 3132314, 3151118, H01J 2700

Patent

active

042887160

ABSTRACT:
A direct heated rod-shaped cathode for an ion source is provided with a region of reduced cross-section adjacent its negative end to maximize the path length of electron movement within the discharge chamber and to provide effective control of the cathode resistance in a region that is relatively free of sputtering erosion during use.

REFERENCES:
patent: 3364355 (1968-01-01), Ruby et al.
Dearnaley et al., Ion Implantation, Atomic Energy Research Establishment, Harwell, England, 1973, pp. 324-327.

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