Ion source apparatus and electronic energy optimized method...

Details Ion source apparatus and electronic energy optimized method... Ion source apparatus and electronic energy optimized method...

2006-03-14

2006-03-14

Wells, Nikita (Department: 2881)

Radiant energy

Ion generation

Field ionization type

C422S186000, C422S186050, C204S298060, C204S298160, C204S298310

Reexamination Certificate

active

07012263

ABSTRACT:
The ion source apparatus of the present invention includes at least one pair of antenna-opposed magnets sandwiching an antenna element and moveable to magnetic element and the antenna element both in horizontal and vertical directions in a plasma chamber, and a control means performing a positional adjustment over the antenna-opposed magnets to the antenna element in the plasma chamber. An electrons-generated region of high-concentration is formed around the antenna element through electric fields based on outputs of the antenna element and magnetic fields of the antenna-opposed magnets crossing the antenna element.

REFERENCES:
patent: 5122251 (1992-06-01), Campbell et al.
patent: 6803585 (2004-10-01), Glukhoy
patent: 2003/0091482 (2003-05-01), Weiler et al.
patent: 08-209341 (1996-08-01), None
patent: 2000-048734 (2000-02-01), None

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