Radiant energy – Ion generation – Field ionization type
Patent
1992-05-21
1994-05-31
Anderson, Bruce C.
Radiant energy
Ion generation
Field ionization type
31511181, H01J 3708
Patent
active
053171616
ABSTRACT:
In addition to the three electrodes of a unipotential lens following a plasma chamber, an ion source for ion beam lithography or ion beam semiconductor or the like has a fourth electrode which is at the same potential as the second electrode and at a potential lower than the potential of the first and third electrodes The result is improved resolution.
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Chalupka Alfred
Fegerl Johannes
Lammer Gertraud
Stengl Gerhard
Wolf Peter
Anderson Bruce C.
Dubno Herbert
IMS Ionen Mikrofabrikations Systeme Gesellschaft m.b.H.
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