Ion source

Details Ion source Ion source

1982-05-04

1984-05-08

Smith, Alfred E.

Radiant energy

Ion generation

Electron bombardment type

31511181, 376144, H01J 2720

Patent

active

044477325

ABSTRACT:
A magnetic filter for an ion source reduces the production of undesired ion species and improves the ion beam quality. High-energy ionizing electrons are confined by the magnetic filter to an ion source region, where the high-energy electrons ionize gas molecules. One embodiment of the magnetic filter uses permanent magnets oriented to establish a magnetic field transverse to the direction of travel of ions from the ion source region to the ion extraction region. In another embodiment, low energy 16 eV electrons are injected into the ion source to dissociate gas molecules and undesired ion species into desired ion species.

REFERENCES:
patent: 3030543 (1962-04-01), Luce
patent: 3760225 (1973-09-01), Ehlers et al.
patent: 3766396 (1973-10-01), Kruger et al.
patent: 4140943 (1979-02-01), Ehlers
patent: 4383177 (1983-05-01), Keller et al.
Ehlers et al., "Effect of a Magnetic Filter . . . ", Rev. Sci. Instrum., 52(10), Oct. 1981.
Ehlers et al., "Characteristics of the Berkeley Multicusp Ion Source", Rev. Sci. Instrum., 50(11), Nov. 1979.
Leung, "A Multipole Negative Ion Source", Proceedings of the Symposium on the Production and Neutralization of Hydrogen Ions and Beams, Sep. 1977.

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