Radiant energy – Electron energy analysis
Patent
1977-01-12
1978-08-15
Smith, Alfred E.
Radiant energy
Electron energy analysis
250309, H01J 3500
Patent
active
041075269
ABSTRACT:
An ion scattering spectrometer (ISS) providing enhanced sensitivity, reduced background, and preferential detection of low-mass scattered ions over that of high-mass sputtered ions is disclosed. These advantages are accomplished by a biasing arrangement which maintains a potential difference between the analyzer exit and the detector input at less than 30 volts and substantially eliminates the high potential provided on detector inputs of prior art ion scattering spectrometers which attracted and thereby accelerated ions prior to impinging on the inputs.
REFERENCES:
patent: 3735128 (1973-05-01), Palmberg
patent: 3742214 (1973-06-01), Helmer et al.
patent: 3916190 (1975-10-01), Valentine et al.
patent: 3939344 (1976-02-01), McKinney
McKinney James T.
Rusch Thomas W.
Alexander Cruzan
Anderson B. C.
Barte William B.
Minnesota Mining and Manufacturing Company
Sell Donald M.
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